Publikationen in Wissenschaftlichen Zeitschriften

2018   2017   2016   2015   2014   2013   2012   2011   2009   2008   2007   2006   2005   2004   2003   2002   2001   2000   1999 - 1994


 

2021


Boysen, Nils; Zanders, David; Berning, Thomas; Beer, Sebastian M. J.; Rogalla, Detlef; Bock, Claudia; Devi, Anjana:
Atomic layer deposition of dielectric Y2O3 thin films from a homoleptic yttrium formamidinate precursor and water
In: Royal Society of Chemistry Adv., 2021, 11, 2565–2574
DOI: 10.1039/d0ra09876k

 

2020


Jiménez-Sáez, A.; Alhaj-Abbas, A.; Schüßler, M.; Abuelhaija, A.; El-Absi, M.; Sakaki, M.; Samfaß, L.; Benson, N.; Hoffmann, M.;
Jakoby, R.; Kaiser, T.; Solbach, K.:
Frequency-Coded mm-Wave Tags for Self-Localization System Using Dielectric Resonators
In: J. Infrared Millim. Terahertz Waves, Vol. 41, 908–925(2020)
DOI: 10.1007/s10762-020-00707-0

Liu, Xuan; Samfaß, Lisa; Kolpatzeck, Kevin; Häring, Lars; Balzer, Jan C.; Hoffmann, Martin; Czylwik, Andreas:
Terahertz Beam Steering Concept Based on a MEMS-Reconfigurable Reflection Grating
In: Sensors 2020, 20(10), 2874
DOI: 10.3390/s20102874

Mai, Lukas; Mitschker, Felix; Bock, Claudia; Niesen, Alessia; Ciftyurek, Engin; Rogalla, Detlef; Mickler, Johannes;
Erig, Matthias; Li, Zheshen; Awakowicz, Peter; Schierbaum, Klaus; Devi, Anjana:
From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for
Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications

In: Small 2020, 1907506
DOI: 10.1002/smll.201907506

Schmitt, Philip; Hoffmann, Martin:
Engineering a Compliant Mechanical Amplifier for MEMS Sensor Applications
In: Journal of Microelectromechanical Systems PP(99):1-14, 2020
DOI: 10.1109/JMEMS.2020.2965260

Schricker, K.; Samfaß, L.; Grätzel, M.; Ecke, G.; Bergmann, J.P.:
Bonding mechanisms in laser-assisted joining of metal-polymer composites
In: Journal of Advanced Joining Processes, 1 (2020) 100008
DOI: 10.1016/j.jajp.2020.100008

Samfaß, Lisa; Baak, Nikolas; Meya, Rickmer; Hering, Oliver; Tekkaya, A. Erman; Walther, Frank:
Micro-magnetic damage characterization of bent and cold forged parts
In: Production Engineering 14, 77–85(2020)
DOI: 10.1007/s11740-019-00934-y

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2019


Zanders, David; Ciftyurek, Engin; Subasi, Ersoy; Huster, Niklas; Bock, Claudia; Kostka, Aleksander; Rogalla, Detlef;
Schierbaum, Klaus; Devi, Anjana:
PEALD of HfO2 Thin Films: Precursor Tuning and a New Near- Ambient-Pressure XPS Approach to in Situ Examination
of Thin-Film Surfaces Exposed to Reactive Gases

In: ACS Appl. Mater. Interfaces 2019, 11, 28407-28422
DOI: 10.1021/acsami.9b07090

Jaehnike, Felix; Pham, Duy Vu; Bock, Claudia; Kunze, Ulrich:
Role of gallium and yttrium dopants on the stability and performance of solution processed indium oxide thin-film transistors
In: J. Mater. Chem. C, 2019, 7, 7627-7635
DOI: 10.1039/C8TC06270F

Mai, Lukas; Zanders, David; Subasi, Ersoy; Ciftyurek, Engin; Hoppe, Christian; Rogalla, Detlef; Gilbert, Wolfram;
de los Arcos, Teresa; Schierbaum, Klaus; Grundmeier, Guido; Bock, Claudia; Devi, Anjana:
Low Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxid from a Functionalized Alkyl Precursor:
Fabrication and Evaluation fo SnO2-Based Thin-Film Transistor Devices

In: ACS Appl. Mater. Interfaces 2019, 11, 3169-3180
DOI: 10.1021/acsami.8b16443

Kasischke, Maren; Subasi, Ersoy; Bock, Claudia; Pham, Duy-Vu, Gurevich, Evgeny L.; Kunze, Ulrich; Ostendorf, Andreas:
Femtosecond laser patterning of grapheme electrodes for thin-film transistors
In: Applied Surface Science 478 (2019) 299-303
DOI: 10.1016/j.apsusc.2019.01.198

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2018


Schmitt, Philip; Mehner, Hannes; Hoffmann, Martin:
A Micromechanical Binary Counter with MEMS-Based Digital-to-Analog Converter
In: Proceedings 2018, 2, 807
DOI: 10.3390/proceedings2130807

Weigel, Christoph; Sinzinger, Stefan; Hoffmann, Martin:
Deep etched and released microstructures in Zerodur in a fluorine-based plasma
In: Microelectronic Engineerung, Volume 198, 15 October 2018, pp. 78-84
DOI: 10.1016/j.mee.2018.07.004

Si, Shuhao; Hoffmann, Martin:
Image inverting, topography and feature size manipulation using organic/inorganic bi-layer lift-off for nanoimprint template
In: Microelectronic Engineering, Volume 197, S. 39-44, October 2018
DOI: 10.1016/j.mee.2018.05.005

Cwik, Stefan; Mitoraj, Dariusz; Mendoza Reyes, Oliver; Rogalla, Detlef; Peeters, Daniel; Kim, Jiyeon; Schütz, Hanno Maria;
Bock, Claudia; Beranek, Radim; Devi, Anjana:
Direct growth of MoS2 and WS2 layers by Metal Organic Chemical Vapor Deposition
In: Adv. Mater. Interfaces 2018
DOI: 10.1002/admi.201800140

Weigel, Christoph; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin:
A microoptical sidestream cuvette based on fast passive gas exchange for capnography
In: Sensors and Actuators A: Physical, Volume 276, 15. Juni 2018, S. 68-75
DOI: 10.1016/j.sna.2018.04.022

Weigel, Christoph; Schulze, Marcel; Gargouri, Hassan; Hoffmann, Martin:
Deep etching of Zerodur glass ceramics in a fluorine-based plasma
In: Microelectronic Engineering, Volume 185-186, 05. Januar 2018, S. 1-8
DOI: 10.1016/j.mee.2017.10.013

Mai, Lukas; Boysen, Nils; Subasi, Ersoy; de los Arcos, Teresa; Rogalla, Detlef; Grundmeier, Guido; Bock, Claudia;
Lu, Hong-Liang; Devi, Anjana:
Water assisted atomic layer deposition of yttrium oxide using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato)
yttrium(III): process development, film characterization and functional properties
In: RSC Advances, 2018, 8, 4987-4994
DOI: 10.1039/C7RA13417G

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2017


Bohm, Sebastian; Goj, Boris; Dittrich, Lars; Dressler, Lothar; Hoffmann, Martin:
Material dependence of the contact behaviour of oscillating microprobes - modelling and experimental evidence
In: Journal of Micro- and Nanomanufacturing 5(2), 2. März 2017
DOI: 10.1115/1.4035619

Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin:
Stress-modulated tilt actuator for tunable optical prisms
In: Sensors and Actuators A: Physical Volume 266, 15. Oktober 2017, S. 328 - 337
DOI: 10.1016/j.sna.2017.09.021

Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
The NanoTuFe - Fabrication of large area periodic nanopatterns with tunable feature sizes at low cost
In: Microelectronic Engineering, Volume 180, 5. August 2017, pp. 71-80
DOI: 10.1016/j.mee.2017.06.002

Si, Shuhao; Hoffmann, Martin:
Consecutive imprinting performance of large area UV nanoimprint lithography using bi-layer soft stamps in ambient
atmosphere

In: Microelectronic Engineering, Volume 176, 25. Mai 2017, pp. 62-70
DOI: 10.1016/j.mee.2017.01.032

Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
Low-cost fabrication of nanoimprint templates with tunable feature sizes at a constant pitch
In: Microelectronic Engineering, Volume 170, 25. Februar 2017, pp. 34-38
DOI: 10.1016/j.mee.2016.12.023

Weigel, Christoph; Markweg, Eric; Müller, Lutz; Schulze, Marcel; Gargouri, Hassan; Hoffmann, Martin:
A monolithic micro-optical interferometer deep etched into fused silica
In: Microelectronic Engineering, Volume 174 (2017), 25. April 2017, pp. 40-45
DOI: 10.1016/j.mee.2017.01.002

Weigel, Christoph; Schulze, Marcel; Gargouri, Hassan; Hoffmann, Martin:
Deep etching of Zerodur glass ceramics in a fluorine-based plasma
In: Microelectronic Engineering, Oktober 2017
DOI: 10.1016/j.mee.2017.10.013

J. F. von Pock, D. Salloch, U. Wieser, T. Hackbarth, and U. Kunze:
Identification and separation of rectifier mechanisms in Si/SiGe ballistic cross junctions
In: J. Appl. Phys. 121, 014304 (2017).
DOI: 10.1063/1.4973279

J. von Pock, U. Wieser, and U. Kunze:
Input-current addition in closely positioned dual-stage ballistic rectifiers
In: Phys. Rev. Applied 7, 044023 (2017).
DOI: 10.1103/PhysRevApplied.7.044023

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2016


Bunge, Frank; Leopold, Steffen; Bohm, Sebastian; Hoffmann, Martin:
Scanning micromirror for large, quasi-static 2D-deflections based on electrostatic driven rotation of a hemisphere
In: Sensors and Actuators A: Physical 243 (2016), pp. 159-166
DOI: 10.1016/j.sna.2016.02.031

Degenhardt, Sarah; Cheriguen, Yahia; Geiling, Thomas; Hoffmann, Martin:
Micro-Venturi injector: design, experimental and simulative examination
In: Journal of Physics: Conference Series, Volume 757, Number 1
DOI: 10.1088/1742-6596/757/1/012027

Lu, Pai; Ohlckers, Per; Müller, Lutz; Leopold, Steffen; Hoffmann, Martin; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika;
Chen, Xuyuan:
Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
In: Electrochemistry Communications, Volume 70, September 2016, pp. 51-55
DOI: 10.1016/j.elecom.2016.07.002

Mehner, Hannes; Müller, Lutz; Biermann, Steffen; Hänschke, Frank; Hoffmann, Martin:
Process flow to integrate nanostructures on silicon grass in surface micromachined systems
In: Journal of Physics: Conference Series, Volume 757, Number 1
DOI: 10.1088/1742-6596/757/1/012022

Müller, Lutz; Mehner, Hannes; Hoffmann, Martin:
MEMS gas ionization sensor with palladium nanostructures for use at ambient pressure
In: Journal of Physics: Conference Series, Volume 757, Number 1
DOI: 10.1088/1742-6596/757/1/012023

J. F. von Pock, D. Salloch, G. Qiao, U. Wieser, T. Hackbarth, and U. Kunze:
Quantization and anomalous structures in the conductance of Si/SiGe quantum point contacts
In: J. Appl. Phys. 119, 134306 (2016).
DOI: 10.1063/1.4945116

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2015


Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin:
2D stepping drive for hyperspectral systems
In: Journal of Micromechanics and Microengineering 25 (7)
DOI: 10.1088/0960-1317/25/7/074002

Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Hoffmann, Martin:
Linear micromechanical stepping drive for pinhole array positioning
In: Journal of Micromechanics and Microengineering 25 (5), p. 55009
DOI: 10.1088/0960-1317/25/5/055009

Fischer, Michael; Gropp, Sebastian; Nowak, Jacek; Capraro, Beate; Sommer, Ralf; Hoffmann, Martin; Müller, Jens:
Radio Frequency Microlectromechanical System-Platform based on Silicon-Ceramic Composite Substrates
In: Journal of Microelectronics and Electronic Packaging (2015) 12, pp. 37-42
DOI: 10.4071/imaps.442

Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Design and characterization of a resonant triaxial microprobe
In: Journal of Micromechanics and Microengineering 25 (2015) 125011
DOI: 10.1088/0960-1317/25/12/125011

Gropp, Sebastian; Fischer, Michael; Dittrich, Lars; Capraro, Beate; Müller, Jens; Hoffmann, Martin:
Wetting behaviour of glasses on nanostructured silicon surfaces
In: Journal of Electrical Engineering Volume 3, Number 1, January 2015 (Serial Number 7)
DOI: 10.17265/2328-2223/2015.01.002

Hillenbrand, Matthias; Weiss, Robert; Endrödy, Csaba; Grewe, Adrian; Hoffmann, Martin; Sinzinger, Stefan:
Chromatic confocal matrix sensor with actuated pinhole arrays
In: Applied Optics 54 (15), pp. 4927-4936
DOI: 10.1364/AO.54.004927

Mehner, Hannes; Weise, C.; Schwebke, Silvan; Hampl, Stefan; Hoffmann, Martin:
A passive microsystem for detecting multiple acceleration events beyond a threshold
In: Microelectronic Engineering, Volume 145, 1 September 2015, pp. 104-111
DOI: 10.1016/j.mee.2015.03.023

Weigel, Christoph; Schneider, Mike; Schmitt, Jean; Hoffmann, Martin; Kahl, Sebastian; Jurisch, Reinhard:
Self-sufficient sensor for oxygen detection in packaging via radio-frequency identification
In: Journal of Sensors and Sensor Systems, Volume 4 (1), pp. 179-186, 2015
DOI: 10.5194/jsss-4-179-2015

Weinberger, Stefan; Nguyen, Tran Trung; Lecomte, Roméo; Cheriguen, Yahia; Ament, Christoph; Hoffmann, Martin:
Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation
In: Microsystem Technologies April 2015, Springer Berlin Heidelberg
DOI: 10.1007/s00542-015-2535-2

S. Pal, H. Nong, S. Markmann, N. Kukharczyk, S. R. Valentin, S. Scholz, A. Ludwig, C. Bock, U. Kunze, A. D. Wieck, N. Jukam:
Ultrawide electrical tuning of light matter interaction in a high electron mobility transistor structure
In: Scientific Reports 5, 16812 (2015).
DOI: 10.1038/srep16812

F. Jaehnike, D. V. Pham, R. Anselmann, C. Bock, U. Kunze:
High quality Solution-Processed Silicon Oxide Gate Dielectric applied on Indium Oxide based Thin-Film Transistors
In: ACS Appl. Mater. Interfaces 7, 14011-14017 (2015).
DOI: 10.1021/acsami.5b03105

S. Markmann, H. Nong, S. Pal, N. Hekmat, S. Scholz, N. Kukharchyk, A. Ludwig, S. Dhillon, J. Tignon, X. Marcadet, C. Bock,
U. Kunze, A. D. Wieck, N. Jukam:
Spectral modification of the laser emission of a terahertz quantum cascade laser induced by broad-band double
pulse injection seeding

In: Appl. Phys. Lett. 107, 111103 (2015).
DOI: 10.1063/1.4930993

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2014


Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Semi-contact measurements of three-dimensional surfaces utilizing a resonant uniaxial microprobe
In: Measurement Science and Technology 25 (2014) 064012
DOI: 10.1088/0957-0233/25/6/064012

Müller, Lutz; Käpplinger, I.; Biermann, S.; Brode, Wolfgang; Hoffmann, Martin:
Infrared emitting nanostructures for highly efficient microhotplates
In: Journal of Micromechanics and Microengineering 24 (2014) 035014
DOI: 10.1088/0960-1317/24/3/035014

Weinberger, Stefan; Nguyen, Tran Trung; Ament, Christoph; Hoffmann, Martin:
Quasi-static micromirror with enlarged deflection based on aluminum nitride thin film springs
In: Sensors and Actuators A: Physical 210 (0), 1. April 2014, pp. 165-174
DOI: 10.1016/j.sna.2014.02.017

C. Weber, M. Oberberg, D. Weber, C. Bock, D. V. Pham, U. Kunze:
Improved morphology and performance of solution-processed metal-oxide thin-film transistors due to a
polymer based interface modifier

In: Adv. Mater. Interfaces 1400137 (2014).
DOI: 10.1002/admi.201400137

J. Stella, M. Pohl, C. Bock, U. Kunze:
Influence of grain orientation on the local deformation mode induced by cavitation erosion in a CuSnNi alloy
In: Waer 316, 1 (2014).
DOI: 10.1016/j.wear.2014.04.010

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2013


Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Resonant probing system comprising a high accurate uniaxial nanoprobe and a new evaluation unit
In: Journal of Micromechanics and Microengineering 23 (2013) 095012
DOI: 10.1088/0960-1317/23/9/095012

Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Resonant biaxial nanoprobe utilized for non-contact surface measurements
In: Sensors & Transducers Journal 157 (2013), no. 10, pp. 392-399   ISSN 1726-5479
Link

Leopold, Steffen; Polster, Tobias; Paetz, Daniel; Knoebber, Fabian; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin:
MOEMS tunable microlens made of aluminum nitride membranes
In: J. Micro/Nanolith. MEMS MOEMS 12(2), 023012 (Jun 10, 2013)
DOI: 10.1117/1.JMM.12.2.023012

Leopold, Steffen; Müller, Lutz; Kremin, Christoph; Hoffmann, Martin:
Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma
emission spectroscopy
In: Journal of Micromechanics and Microengineering 23 (2013) 074001
DOI: 10.1088/0960-1317/23/7/074001

Mehner, Hannes; Leopold, Steffen; Hoffmann, Martin:
Variation of the intrinsic stress gradient in thin aluminum nitride films
In: Journal of Micromechanics and Microengineering 23 (2013) 095030
DOI: 10.1088/0960-1317/23/9/095030

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2012


Bartsch, Heike; Albrecht, Arne; Hoffmann, Martin; Müller, Jens:
Micro forming process for embossing of LTCC tapes
In: J. Micromech. Microeng. 22 (2012) 015004 
DOI: 10.1088/0960-1317/22/1/015004

C. Bock, S. Weingart, E. Karaissaridis, U. Kunze, F. Speck and Th. Seyller:
Influence of structural properties on ballistic transport in nanoscale epitaxial graphene cross junctions
In: Nanotechnology 23, 395203 (2012).
DOI: 10.1088/0957-4484/23/39/395203

K. Xu, A. P. Milanov, H. Parala, C. Wenger, C. Baristiran-Kaynak, K. Lakribssi, T. Toader, C. Bock, D. Rogalla,
H.-W. Becker, U. Kunze, A. Devi:
Atomic layer deposition of HfO2 thin films employing a heteroleptic Hafnium precursor
In: Chem. Vap. Deposition 18, 27-35 (2012).
DOI: 10.1002/cvde.201106934

M. Szelong, U. Wieser, M. Knop, U. Kunze, D. Reuter, A.D. Wieck:
Hall effect in an asymmetric ballistic cross junction
In: Nature Conference "Frontiers in Electronic Materials", June 17th to 20th 2012, Aachen, 443-444 (2012).
DOI: 10.1002/9783527667703.ch63

J.F. von Pock, D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Elimination of hot-electron thermopower from ballistic rectification using a dual-cross device
In: Nature Conference "Frontiers in Electronic Materials", June 17th to 20th 2012, Aachen, 445-446 (2012).
DOI: 10.1002/9783527667703.ch63

K. Xu, R. Ranjith, A. Laha, H. Parala, A. P. Milanov, R. Fischer, E. Bugiel, J. Feydt, S. Irsen, T. Toader, C. Bock,
D. Rogalla, H.-J. Osten, U. Kunze, A. Devi:
Atomic layer deposition of Gd2O3 and Dy2O3: A study of the ALD characteristics and structural and
electrical properties

In: Chemistry of Materials 24, 651 (2012).
DOI: 10.1021/cm2020862

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2011


Heidrich, N.; Hampl, Stefan; Laqua, D.; Cimalla, Volker; Hoffmann, Martin; Husar, Peter:
Biocompatible piezoelectric microstructures utilizing eye motion for self-sufficient IOP-sensor devices
In: Biomedizinische Technik, Bd. 56, Berlin: de Gruyter (2011) ISSN 1862-278X.
DOI: 10.1515/bmt.2011.821

Leopold, Steffen; Kremin, Christoph; Ulbrich, Angela; Krischok, Stefan; Hoffmann, Martin:
Formation of silicon grass: Nanomasking by carbon clusters in cyclic deep reactive ion etching 
In: Journal of Vacuum Science & Technology B (Vol. 29, Issue 1) (2011)
DOI: 10.1116/1.3521490

Sánchez-Ferrer, Antoni; Fischl, Tamás; Stubenrauch, Mike; Albrecht, Arne; Wurmus, Helmut; Hoffmann, Martin; 
Finkelmann, Heino:
Liquid-crystalline elastomer microvalve for microfluidics
In: Advanced materials, Bd. 23, pp. 4526-4530, Weinheim: Wiley VCH (2011) ISSN 1521-4095
DOI: 10.1002/adma.201102277

Witte, Hartmut; Stubenrauch, Mike; Fröber, Ulrike; Fischer, Robert; Voges, Danja; Hoffmann, Martin:
Integration of 3-D cell cultures in fluidic microsystems for biological screenings
 
In: Engineering in life sciences, Bd. 11, pp. 140-147, Weinheim : Wiley-VCH (2011) ISSN 1618-2863
DOI: 10.1002/elsc.201000045

D. Salloch, U. Wieser, U. Kunze and T. Hackbarth:
Separation of the inertial-ballistic signal from hot-electron thermopower in an injection-type ballistic rectifier
In: "Physics of Semiconductors" (ICPS-30, Seoul, Korea 2010), ed. by J. Ihm and H. Cheong,
American Institute of Physics Conference Proceedings 1399, pp. 321-322 (2011).
DOI: 10.1063/1.3666383

D. Salloch, U. Wieser, U. Kunze and T. Hackbarth:
Influence of channel width on the performance of an injection-type ballistic rectifier: Carrier injection
versus hot-electron thermopower

In: Microelectronic Engineering 88, 2386-2389 (2011).
DOI: 10.1016/j.mee.2011.02.079

D. Bekermann, A. Ludwig, T. Toader, C. Maccato, D. Barreca, A. Gasparotto, C. Bock, A. D. Wieck, U. Kunze,
E. Tondello, R. A. Fischer, and A. Devi:
MOCVD of ZnO films from Bis(Ketoiminato)Zn(II) precursors: structure, morphology and optical properties
In: Chem. Vap. Deposition 17, 155-161 (2011).
DOI: 10.1002/cvde.201006898

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2010


D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Efficient injection-type ballistic rectification in Si/SiGe cross junctions
In: Physica E 42, 2618-2621 (2010).
DOI: 10.1016/j.physe.2010.03.021

M. Wiemann, U. Wieser, D. Reuter, A.D. Wieck, U. Kunze:
Full-wave rectification based upon hot-electron thermopower
In: Appl. Phys. Lett. 97, 062112 (2010).
DOI: 10.1063/1.3475922

S. Weingart, C. Bock, U. Kunze, K.V. Emtsev, Th. Seyller, L. Ley:
Influence of the growth conditions of epitaxial graphene on the film topography and the electron transport properties
In: Physica E 42, 687-690 (2010).
DOI: 10.1016/j.physe.2009.11.006

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2009


Fischer, Michael; Bartsch de Torres, Heike; Pawlowski, P.; Gade, Robert; Barth, S.; Mach, Matthias; Stubenrauch, Mike;
Hoffmann, Martin; Müller, Jens:
Silicon on ceramics - a new integration concept for silicon devices to LTCC
In: Journal of Microelectronics and Electronic Packaging (2009) 6, pp. 1-5
DOI: 10.4071/1551-4897-6.1.1

Perrone, Ruben; Bartsch de Torres, Heike; Hoffmann, Martin; Mach, Matthias; Müller, Jens:
Miniaturized embossed low resistance fine line coils in LTCC
In: Journal of microelectronics and electronic packaging, Bd. 6 (2009), 1, pp.42-48
DOI: 10.4071/1551-4897-6.1.42

Sánchez-Ferrer, Antoni; Fischl, Tamás; Stubenrauch, Mike; Wurmus, Helmut; Hoffmann, Martin; Finkelmann, Heino:
Photo-crosslinked side-chain liquid-crystalline elastomers for microsystems
In: Macromolecular Chemistry and Physics, Volume 210, Issue 20 pp. 1671-1677 (2009)
DOI: 10.1002/macp.200900308

Stubenrauch, Mike; Fröber, Ulrike; Voges, Danja; Schilling, Cornelius; Hoffmann, Martin; Witte, Hartmut:
A modular BIO-MEMS platform for new procedures and experiments in tissue engineering
In: Journal of Micromechanics and Microengineering 19, Juli 2009, 074013
DOI: 10.1088/0960-1317/19/7/074013

A.P. Milanov, T. Thiede, M. Hellwig, H. Parala, C. Bock, H.-W. Becker, D.K. Ngwashi, R.B.M. Cross, S. Paul, U. Kunze,
R.A. Fischer, A. Devi:
Rare-Earth Based Oxide and Nitride Thin Films Employing Volatile Homoleptic Guanidinate Precursors
In: ECS Transactions 25, 143-150 (2009).
DOI: 10.1149/1.3207585

S. Weingart, C. Bock, U. Kunze, F. Speck, Th. Seyller, L. Ley:
Low-temperature ballistic transport in nanoscale epitaxial graphene cross junctions
In: Appl. Phys. Lett. 95, 262101 (2009).
DOI: 10.1063/1.3276560

A.P. Milanov, T. Toader, H. Parala, D. Barreca, A. Gasparotto, C. Bock, H.-W. Becker, D.K. Ngwashi, R. Cross, S. Paul,
U. Kunze, R.A. Fischer, A. Devi:
Lanthanide Oxide Thin Films by Metalorganic Chemical Vapor Deposition Employing Volatile Guanidinate Precursors
In: Chemistry of Materials 21, 5443-5455 (2009).
DOI: 10.1021/cm902123m

D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Thermopower-enhanced efficiency of Si/SiGe ballistic rectifiers
In: Appl. Phys. Lett. 94, 203503 (2009).
DOI: 10.1063/1.3140439

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2008


Bartsch de Torres, Heike; Rensch, Christian; Thelemann, Torsten; Müller, Jens; Hoffmann, Martin:
Fully integrated bridge-type anemometer in LTCC-based microfluidic systems
In: Journal Advances in Science and Technology, Smart Materials & Micro/Nanosystem, Vol. 54, August 2008
DOI: 10.4028/www.scientific.net/AST.54.401

Bartsch de Torres, Heike; Gade, Robert; Albrecht, Arne; Hoffmann, Martin:
Systematic characterization of embossing processes for LTCC tapes
In: Journal of Microelectronics and Electronic Packaging (2008), 5, pp. 142-149   ISSN 1551-4897
DOI: 10.4071/1551-4897-5.4.142

Schumacher, Jens; Grodrian, Andreas; Kremin, Christoph; Hoffmann, Martin; Metze, Josef:
Hydrophobic coating of microfluidic chips structured by SU-8 polymer for segmented flow operation
In: Journal of Micromechanics and Microengineering 18 (2008) 055019, Mai 2008
DOI: 10.1088/0960-1317/18/5/055019

C. Bock, D.V. Pham, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Influence of contact metals on the performance and morphology of pentacene bottom-contact field-effect transistors
In: Physica E 40, 2107-2109 (2008).
DOI: 10.1016/j.physe.2007.09.194

U. Wieser, M. Knop, U. Kunze, D. Reuter, A.D. Wieck:
Magneto-ballistic effects in non-centrosymmetric GaAs/AlGaAs cross junctions
In: Physica E 40, 2179-2181 (2008).
DOI: 10.1016/j.physe.2007.10.115

M. Wiemann, A. Cetinkaya, U. Wieser, U. Kunze, D. Reuter, A.D. Wieck:
Hot-electron bend resistance in a ballistic GaAs/AlGaAs cross junction
In: Physica E 40, 2128-2130 (2008).
DOI: 10.1016/j.physe.2007.10.025

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2007


Cimalla, Volker; Stubenrauch, Mike; Weise, Frank; Fischer, Michael; Tonisch, Katja; Hoffmann, Martin; Ambacher, Oliver:
Suspended nanowire web
In: Applied Physics Letters 90 (2007), 101504, American Institute of Physics, 2007, p. 90ff
DOI: 10.1063/1.2711753

Gentemann, Roland B.; Teufer, Daniel; Temmen, Katrin; Hoffmann, Martin:
3D-fibre channels in silicon by electrical breakdown - New opportunities for optical fibre alignment and microfluidics
In: International Journal of Electronics and Communications (AEÜ), 61(2007)3, pp. 172-176   ISSN 1434-8411
DOI: 10.1016/j.aeue.2006.12.001

Stubenrauch, Mike; Fischer, Michael; Kremin, Christoph; Hoffmann, Martin; Müller, Jens:
Bonding of silicon with filled and unfilled polymers based on black silicon
In: Micro & Nano Letters, 2(2007)1, pp. 6-8
DOI: 10.1049/mnl:20065064

C. Bock, D.V. Pham, U. Kunze, D. Käfer, G. Witte, A. Terfort:
Influence of anthracene-2-thiol treatment on the device parameters of pentacene bottom-contact transistors
In: Appl. Phys. Lett. 91, 052110 (2007).
DOI: 10.1063/1.2767235

D.V. Pham, Y. Gravenstein, C. Bock, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Reduced sheet resistance in pentacene field-effect transistors using thiol-modified electrodes
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 363-364 (2007).

E. Fritz, U. Wieser, U. Kunze, T. Hackbarth:
Ballistic rectification in four-terminal fork-shaped Si/SiGe junctions
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 717-718 (2007).

U. Wieser, M. Knop, P. Koop, U. Kunze, D. Reuter, A. D. Wieck:
Enhanced rectification efficiency in cascaded ballistic GaAs/AlGaAs rectifiers
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 719-720 (2007).

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2006


C. Bock, D.V. Pham, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Improved morphology and charge carrier injection in pentacene field-effect transistors with thiol-treated electrodes
In: J. Appl. Phys. 100, 114517 (7p.) (2006).
DOI: 10.1063/1.2400507

U. Wieser, M. Knop, M. Richter, U. Kunze, D. Reuter, A.D. Wieck:
Ballistic transport and rectification in mesoscopic GaAs/AlGaAs cross junctions
In: Phase Transitions 79, 755-764 (2006).
DOI: 10.1080/01411590600961321

S.A. Poenariu, U. Wieser, U. Kunze, T. Hackbarth:
Quantized conductance and bend resistance in an asymmetric Si/SiGe cross junction
In: Physica E 32, 539-42 (2006).
DOI: 10.1016/j.physe.2005.12.118

M. Knop, U. Wieser, U. Kunze, D. Reuter, A.D. Wieck:
Nonlocal versus local rectification in multiply connected electron waveguide structures
In: Physica E 32, 536-38 (2006).
DOI: 10.1016/j.physe.2005.12.117

M. Knop, U. Wieser, U. Kunze, D. Reuter, A.D. Wieck:
Ballistic rectification in an asymmetric mesoscopic cross junction
In: Appl. Phys. Lett. 88, 082110 (2006).
DOI: 10.1063/1.2179618

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2005


U. Wieser, S. A. Poenariu, U. Kunze, T. Hackbarth:
Phonon induced breakdown of negative bend resistance in an asymmetric Si/SiGe cross junction
In: Appl. Phys. Lett. 87, 252114 (3 pages) (2005).
DOI: 10.1063/1.2150268

M. Knop, M. Richter, R. Maßmann, U. Wieser, U. Kunze, D. Reuter, C. Riedesel, A.D. Wieck:
Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene
In: Semicond. Sci. Technol. 20, 814-18 (2005).
DOI: 10.1088/0268-1242/20/8/031

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2004


K. H. Schmidt, C. Bock, M. Versen, U. Kunze, D. Reuter, A. D. Wieck:
Capacitance and tunneling spectroscopy of InAs quantum dots
In: J. Appl. Phys. 95, 5715-21 (2004).
DOI: 10.1063/1.1703827

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2003


M. Hoffmann, D. Nüsse, E. Voges:
An electrostatically actuated 1x2 moving-fibre switch
In: IEEE Photonics Technology Letters, 15 (2003), 39-41
DOI: 10.1109/LPT.2002.805806

M. Hoffmann, P. Kopka, D. Nüsse, E. Voges:
Fibre-optical MEMS based on bulk silicon micromachining
In: Microsystem Technologies 9 (2003), 299-303
DOI: 10.1007/s00542-002-0237-z

C. Bock, K. H. Schmidt, U. Kunze, S. Malzer, G. H. Döhler:
Valence-band structure of self-assembled InAs quantum dots studued by capacitance spectroscopy
In: Appl. Phys. Lett. 82, 2071-3 (2003).
DOI: 10.1063/1.1564288

D. Reuter, P. Schafmeister, P. Kailuweit, C. Bock, U. Kunze, A. D. Wieck:
Electrical and optical characterization of InAs quantum dots grown on ion implanted GaAs(100)
In: physica status solidi (c) 0, 1109-12 (2003).
DOI: 10.1002/pssc.200303007

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2002


M. Hoffmann, E. Voges:
Bulk silicon micromachining for MEMS in optical communication systems
In: Journal of Micromechanics and Microengineering 12 (2002), 349-360 (Übersichtsbeitrag)
DOI: 10.1088/0960-1317/12/4/301

K. H. Schmidt, C. Bock, U. Kunze, V. V. Khorenko, S. Malzer, G. H. Döhler, M. Versen, D. Reuter, A. D. Wieck:
Electronic structure of InAs self assembled quantum dots
In: Materials Science Engineering B 88, 238-42 (2002).
DOI: 10.1016/S0921-5107(01)00873-X

C. Bock, K. H. Schmidt, U. Kunze, V. V. Khorenko, S. Malzer, G. Döhler:
Electronic structure of self-assembled InAs quantum dots
In: Physica E 13, 208-11 (2002).
DOI: 10.1016/S1386-9477(01)00521-5

U. Wieser, U. Kunze, K. Ismail, J. O. Chu:
Fabrication of Si/SiGe quantum point contacts by electron-beam lithography and shallow wet-chemical etching
In: Physica E 13, 1047-50 (2002).
DOI: 10.1016/S1386-9477(02)00299-0

U. Wieser, U. Kunze, K. Ismail, J. O. Chu:
Quantum ballistic transport in an etch-defined Si/SiGe quantum point contact
In: Appl. Phys. Lett. 81, 1726-8 (2002).
DOI: 10.1063/1.1503157

C. Bock, C. Bronskowski, K. H. Schmidt, U. Kunze, S. Malzer, G. H. Döhler:
Capacitance spectroscopy of electron and hole energy levels in InAs self-assembled quantum dots
In: "Physics of Semiconductors" (ICPS-26, Edinburgh 2002), ed. by A. R. Long, J. H. Davies, Institute of Physics
Conference Series 171, P232 (2002).

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2001


M. Hoffmann, D. Nüsse, E. Voges:
Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches
In: Journal of Micromechanics and Microengineering 11 (2001), 323-328
DOI: 10.1088/0960-1317/11/4/306

V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, C. Rau, A. Snigirev, I. Snigireva,
T. Weitkamp, M. Hoffmann, E. Voges:
Silicon planar refractive lenses with the optimised design
In: Nuclear Instruments & Methods in Physics Research Section A – Acclerators, Spectrometers,
Detectors and Associated Equipment 470 (2001), 131-134
DOI: 10.1016/S0168-9002(01)01024-5

Snigireva, A. Snigirev, C. Rau, T. Weitkamp, V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, M. Hoffmann, E. Voges:
Holographic X-ray optical elements: transition between refraction and diffraction
In: Nuclear Instruments & Methods in Physics Research Section A – Acclerators, Spectrometers,
Detectors and Associated Equipment 467 (2001), 982-985
DOI: 10.1016/S0168-9002(01)00556-3

M. Hoffmann, E. Voges:
New silicon-based fibre assemblies for applications in integrated optics and optical MEMS
In: Applied Physics B Laser and Optics 76 (2001), 629-633
DOI: 10.1007/s003400100720

M. Versen, K. H. Schmidt, C. Bock, D. Reuter, A. D. Wieck, U. Kunze:
Single-electron tunneling through individual InAs quantum dots within a saddle point potential
In: phys. stat. sol.(b) 224, 669-73 (2001).
DOI: 10.1002/(SICI)1521-3951(200104)224:3<669::AID-PSSB669>3.0.CO;2-Q

V. V. Khorenko, S. Malzer, C. Bock, K. H. Schmidt, G. H. Döhler:
Electroluminscence of self-assembled InAs quantum dots in p-i-n diodes
In: phys. stat. sol. (b) 224, 129-32 (2001).
DOI: 10.1002/1521-3951(200103)224:1<129::AID-PSSB129>3.0.CO;2-S

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2000


P. Kopka, M. Hoffmann, and E. Voges:
Coupled U-Shaped Cantilever Actuators for 1x4 and 2x2 Optical Fibre Switches
In: Journal of Micromechanics and Microengineering 10 (2000), 260-264
DOI: 10.1088/0960-1317/10/2/326

V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, M. Hoffmann, E. Voges:
X-ray focusing by planar parabolic refractive lenses made of silicon
In: Optics Communications 177 (2000), 33-38
DOI: 10.1016/S0030-4018(00)00580-0

M. Hoffmann, S. Dickhut, E.Voges:
Fiber Ribbon Alignment Structures Based on Rhombus-Shaped Channels in Silicon
In: IEEE Photonics Technology Letters, 12 (2000), 828-830
DOI: 10.1109/68.853514

V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, T. Weitkamp, C. Rau, I. Snigireva,
A. Snigirev, M. Hoffmann, E. Voges:
X-ray refractive planar lens with minimized absorption
In: Applied Physics Letters 77 (2000), 4058-4060
DOI: 10.1063/1.1332401

K. H. Schmidt, M. Versen, C. Bock, U. Kunze, D. Reuter, A. D. Wieck:
In-plane and perpendicular tunneling through InAs quantum dots
In: Physica E 7, 425-9 (2000).
DOI: 10.1016/S1386-9477(99)00354-9

K. H. Schmidt, M. Versen, C. Bock, D. Reuter, A. D. Wieck, U. Kunze:
Topographie und elektrische Eigenschaften von InAs-Quantenpunkten
In: Materialwiss. u. Werkstofftech. 31, 837-44 (2000).
DOI: 10.1002/1521-4052(200009)31:9<837::AID-MAWE837>3.0.CO;2-T

U. Wieser, D. Iamundo, U. Kunze, T. Hackbarth, U. König:
Nanoscale patterning of Si/SiGe heterostructures by electron-beam lithography and selective wet-chemical etching
In: Semicond. Sci. Technol. 15, 862-7 (2000).
DOI: 10.1088/0268-1242/15/8/313

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1999


M. Hoffmann, P. Kopka, E. Voges:
All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining
In: IEEE Journal of Selected Topics in Quantum Electronics 5 (1999), 46-51
DOI: 10.1109/2944.748104

M. Hoffmann, P. Kopka, E. Voges:
Optical fibre switches based on full wafer silicon micromachining
In: Journal of Micromechanics and Microengineering 9, (1999), 151-155
DOI: 10.1088/0960-1317/9/2/311

M. Hoffmann, P. Kopka, E. Voges:
Bistable Micromechanical Fiber-Optic Switches on Silicon with Thermal Actuators
In: Sensors & Actuators A78 (1999), Special Issue MEMS '98, 28-35
DOI: 10.1016/S0924-4247(99)00200-9

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1998


M. Hoffmann, P. Kopka, E. Voges:
Thermo-optical digital switch arrays in silica-on-silicon with defined zero-voltage state
In: IEEE Journal of Lightwave Technology 16 (1998), 395-400
DOI: 10.1109/50.661366

M. Hoffmann, P. Kopka, T. Groß, E. Voges:
All-silicon bistable micromechanical fibre switches
In: IEE Electronics Letters 34, (1998), 207-208
DOI: 10.1049/el:19980145

U. Wieser, S. Skaberna, U. Kunze:
Self-adjusting formation of a lateral confinement potential in Si/SiGe heterostructures with compensating PN layers
In: Superlattices and Microstructures 23, 981-4 (1998).
DOI: 10.1006/spmi.1996.0347

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1997


M. Hoffmann, P. Kopka, E. Voges:
Low-loss fiber-matched low-temperature PECVD waveguides with small core dimensions for optical communication
systems

In: IEEE Photonics Technology Letters 9 (1997), 1238-1240
DOI: 10.1109/68.618490

S. Skaberna, U. Wieser, U. Kunze:
Creation of a lateral potential modulation at the slope of an etched heterostructure with compensating PN layers
In: "Quantum Devices and Circuits", ed. by K. Ismail, S. Bandyopadhyay, J. P. Leburton (Imperial College Press,
London 1997), pp. 57-62 (1997).
DOI: 10.1142/9781783263479

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1994


M. Hoffmann, H. Bezzaoui, E. Voges:
Micromechanical Cantilever Resonators with integrated optical interrogation
In: Sensors and Actuators A44, (1994), 71-75
DOI: 10.1016/0924-4247(94)00776-4

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